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Precision positioning systems for optimized performance in ultra-high vacuums

Dec 06, 2015

By: Scott Jordan and Stefan Vorndran

Specialized motion control products constructed for safe operation in vacuums provide critical performance for today's demanding vacuum applications in markets such as semiconductor manufacturing and inspection, fabrication, aerospace, life sciences, medical, nanotechnology, pharmaceuticals, photonics, telecommunications, semiconductors, astronomy, and microscopy. Key attributes of these systems include materials and a.ssembly details selected for use in vacuum, motor, and electronic subassemblies with appropriate material and heat performance, bake-out compatibility, and clean preparation and shipping practices that avoid contamination.

View the original article and related content on Control Engineering